Micro-spikes formed on mesoporous silicon by UV picosecond laser irradiation
نویسندگان
چکیده
منابع مشابه
Picosecond laser ablation for silicon micro fuel cell fabrication
We have investigated laser ablation as a microfabrication approach to produce micro fuel cells (MFCs) in silicon. Picosecond pulses (15 ps) at a wavelength of 355 nm are used to make all of the MFC structures. To assess the benefits and drawbacks of laser ablation, reference cells have been produced by deep reactive ion etching (DRIE) using matching geometries. Ablated and etched cells have bee...
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ژورنال
عنوان ژورنال: Applied Surface Science
سال: 2020
ISSN: 0169-4332
DOI: 10.1016/j.apsusc.2019.144820